Laboratory for Field-Emission Scanning Electron Microscopy and Focused Ion Beam Applications

The FIB-FESEM laboratory hosts a Field-Emission-Gun Scanning Electron Microscope with integrated ion column (FEI QuantaTM 3D FEG) for imaging at high spatial resolution, crystallographic orientation analysis and nanomachining with a focused ion beam. As part of the Core Facility Electron Beam Microanalysis (CFE) the FIB-FESEM laboratory is jointly run by the Earth Sciences Departments (Department of Lithospheric Research, Department of Geology, Department of Mineralogy and Crystallography, Department of Paleontology) of the Faculty of Earth Sciences, Geography and Astronomy (FGGA) at the University of Vienna. In addition, members of other faculties and centres of the University of Vienna and external partners have access to the FIB-FESEM laboratory in the frame of research collaborations and contract research.

FEI Quanta^TM 3D FEG

The FEI Quanta^TM 3D FEG instrument is a Field-Emission-Gun Scanning Electron Microscope with integrated focused ion beam (FIB) as well as various different signal detection systems and several periphery components.
The Quanta^TM 3D FEG is an extraordinarily versatile tool for material characterization in the solid state, allowing for electron microscopy at high spatial resolution (down to 1.2 nm at 30 kV) and sample nano-machining using FIB. The dual beam instrument is equipped with a FEG source electron column and a Gallium-liquid-metal-ion-source column arranged at an angle of 52° with respect to the vertical electron column. The coincidence point of the two beams is at a working distance of 10 mm. Acceleration voltages are up to 30 kV for both beams at probe currents up to 200 nA for the electron beam and 1pA to 65 nA for the ion-beam.
The instrument is equipped with secondary electron detectors for three different vacuum modes (high vacuum, low vacuum and ESEM), a backscattered electron detector (BSED) for z-contrast imaging, a forward scattered electron detector (FSD) for orientation contrast imaging, an electron backscatter diffraction detector (EBSD) for crystallographic orientation mapping, and a detector for scanning transmission electron microscopy (STEM). The energy dispersive X-ray detection system (EDX) provides semi-quantitative compositional information from standardless analysis (spot analysis and spectral mapping). Stage operations can be monitored using two CCD-cameras. Ion beam sputtering is used for cross sectioning, serial sectioning and for the preparation of thin, electron transparent foils. An OmniprobeTM 100.7 micromanipulator is used for in-situ lift-out of TEM foils. Furthermore, the system is equipped with Gas Injection Systems for Pt- and C-deposition. 
The FIB-SEM instrument is tuned to provide 2D and 3D information on microstructures, textures and compositional characteristics of geo-materials at high spatial resolution.

For further information on the FEI Quanta 3D FEG instrument contact:

• Gerlinde Habler

 Web Calendar

FEI Quanta 3D FEG ONLINE WEBCALENDAR