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Laboratory for Scanning Electron microscopy and Focused Ion Beam Applications

The SEM-FIB laboratory hosts a conventional tungsten filament SEM (FEI Inspect S) and a Field-Emission-Gun Scanning Electron Microscope with integrated Focused Ion Beam (FEI QuantaTM 3D FEG).
The SEM-FIB facility is shared among the Departments of Lithospheric Research, Geodynamics and Sedimentology, Environmental Geosciences, Paleontology and Mineralogy & Crystallography at the Faculty of Earth Sciences, Geography and Astronomy of the University of Vienna.

FEI Inspect S
room UZA 2U119

The Inspect S is our basic tool for standard electron microscopy, allowing for fast characterization of mineral, fossil and rock surfaces. The apparatus is equipped with secondary electron detectors for operation at high vacuum and low vacuum, as well as a back scattered electron detector and an energy dispersive X-ray detection unit (EDAX Apollo XV) for semi-quantitative micro-chemical  analysis and a cathodoluminescence detector.


For further information on the Inspect S instrument contact:

Prof. Dipl.-Geol. Dr. Jürgen KRIWET   
phone: ++43-1-4277-53520
email:   juergen.kriwet@univie.ac.at

room UZA 2U120

The QuantaTM 3D FEG is an extraordinarily versatile tool allowing for high resolution electron microscopy (resolution down to 1.2 nm at 30kV), ion milling using FIB, semi-quantitative compositional analysis (EDX) and crystallographic orientation mapping based on electron back scatter diffraction (EBSD). The QuantaTM 3D FEG is a dual beam instrument, equipped with a FEG source electron beam column and a Gallium-source ion beam column. The coincidence point of the two beams is at a working distance of 10 mm. Acceleration voltages are up to 30kV at beam currents up to 200nA for the electron beam and 1pA to 65nA for the ion-beam. The instrument is equipped with secondary electron detectors for three different vacuum modes (high vacuum, low vacuum and ESEM), a backscattered electron detector (BSED) for z-contrast imaging and a detector for scanning transmission electron microscopy (STEM). The energy dispersive X-ray detection system provides semi-quantitative compositional information (spot analysis and spectral mapping). Stage operations can be monitored using two CCD-cameras. Ion beam milling is used for cross sectioning, serial sectioning and for the preparation of thin, electron transparent foils (TEM lamellae). An OmniprobeTM 100.7 micromanipulator is used for in-situ lift-out. Furthermore, the system is equipped with Gas Injection Systems for Pt- and C-deposition.
The Dual Beam instrument is tuned to provide high resolution 2D and 3D information on microstructures, textures and compositional characteristics of geo-materials.


Check out the specifications of our FEI Quanta 3D FEG equipment: CLICK HERE

For further information on the QuantaTM 3D FEG instrument contact:

Dr. Gerlinde HABLER   
phone: ++43-1-4277-53475
email:   gerlinde.habler@univie.ac.at

Department of Lithospheric Research
University of Vienna
Althanstraße 14 (UZA II)
1090 Vienna

T: +43-1-4277-534 01
F: +43-1-4277-95 34
Universität Wien | Universitätsring 1 | 1010 Wien | T +43-1-4277-0